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University of Central Florida

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Bid Information

Bid Alert No: 00000593339

Bid Title: University of Central Florida

Agency Bid No. Title: 1535MC

Received Date: 06/07/2016

Close Date: 06/24/2016

Purchase Type: Not Stated

Delivery Point:

Delivery Date: Not Stated

Special Notices: Questions Due By Optional 06/13/2016 05:00 PM


Specifications include, but are not limited to:GENERAL REQUIREMENTS The following are minimum requirements of the Sputtering Deposition Tool.Chamber:- Cylindrical style chamber, 304L SS, electro-polished- Hinged top lid for ease of access- (2) 6 CF viewports with integrated shutters, capable of remove shutter drive without breaking vacuum preventinginexperienced users from operating shutter.- Ports available for (3) gauge heads- Ports available for load-lock- Ports available for RGA- Chamber must be designed to incorporate RHEED as future upgrade. No modifications or shielding required.Instrument Rack:- Welded stainless steel frame with open frame work design- Chamber must not be enclosed with panels- Durable powder coated table top- Utilities must be located on backside of instrument rack mounted in removable boxes for ease of access (pleaseshow picture of design)Vacuum Pumps:- Pfeiffer HiPace 700 l/s turbopump with delayed vent valve- N2 purge to allow oxygen processing- Pfeiffer 7cfm rotary vane backing pump- Interconnecting plumbing and hardwareSputtering Guns:- System is capable of accommodating up to (7) 2 con-focal sputtering sources, and (1) center 3 sputtering gunposition normal incidence to substrate.- Includes (1) 2 UHV con-focal sputtering source with chimney, pneumatic shutter, and gas injection capability.- Includes (1) 3 UHV sputtering source with chimney, pneumatic shutter, and gas injection capabilities.- 2 sputtering gun must be able to accommodate up to 0.125 thick magnetic targets including pure iron.- All guns must have modular magnet design to allow balanced, unbalanced, and magnetic material configurations.Dedicated gun for magnetic material sputtering is not accepted, must have versatility.- Magnetics must be located in vacuum, outside of cooling water, with curie point of 200C

Bid Related Documents

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Product Code: 49029

Agency Information

Issuing Agency: University of Central Florida

State: Florida

Agency Type: State and Local

Contact: Brian Sargent, Purchasing Department 12479 Research Parkway Bldg 600, Orlando, Florida, 32826

Phone: 407-823-2661

Fax: 407-823-5551




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