Government Contract | Alabama
Atomic Layer Deposition Equipment

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Bid Information

Bid Alert No: 00001790936

Bid Title: Atomic Layer Deposition Equipment

Agency Bid No. Title: 2019-23

Received Date: 07/19/2019

Close Date: 08/01/2019

Purchase Type: Not Stated

Delivery Point:

Delivery Date: Not Stated


Specifications include, but are not limited to:Item 1: Arradiance GEMStar XT-SR Single Manifold Thermal / PEALD Ready Benchtop System(or equivalent): Thermal ALD deposition of oxides, nitrides, etc. temperature up to 300C; Ability to process multiple wafers in one run;Ability/interface to be upgraded to Plasma-Enhanced (PE-ALD); At least 1-year manufacturer warranty. Including at a minimum: 1 - 2 zone 1500 W Reactor Chamber 1 - ALD Material Distribution Manifold 2 - Moveable Up to 175C Material Heat Zones 2- 150ml DOT Certified ALD Precursor Bottles 1 External Interface with Ball Valve 1 120V/20A/60Hz USB Control Module 1 Windows Computer PackageItem 2: ARR-40591B-DOT 4B 150ML Bottle w/ 175C Bellows Valve (or equivalent)Item 3: ARR-850880 XT Glovebox Interface (or equivalent)Item 4: ARR-40800 Pump Package (or equivalent)

Bid Related Documents

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Product Codes: 49000, 49300, 49500

Agency Information

Issuing Agency: University of North Alabama

State: Alabama

Agency Type: State and Local

Contact: Cindy Conlon, Office of Procurement One Harrison Plaza, Bibb Graves Hall, Room 126, Florence, Alabama, 35632

Phone: 256-765-4293

Fax: 256-765-4329




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