Government Contract | Florida
Thermal Evaporator and Glovebox

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Bid Information

Bid Alert No: 00000431762

Bid Title: Thermal Evaporator and Glovebox

Agency Bid No. Title: ITB1515JC

Received Date: 12/07/2015

Close Date: 01/06/2016

Purchase Type: Not Stated

Delivery Point: Orlando, Florida

Delivery Date: Not Stated

Special Notices: Questions Due By Optional 12/16/2015 02:00 PM, Bidder Preregistration


Specifications include, but are not limited to:Evaporator:Minimum of 8 thermal evaporation sources.6 resistive thermal sources capable using current-controlled heating. These sources should allow for multiple sizes and types of deposition boats. These sources must have PID controls with autotune capability.2 sources with active temperature control and interchangeable crucibles. These sources must have PID controls with autotune capability.Simultaneous co-deposition with 4 sources with independent rate control and thickness control on all 4 sources. Each sensor should have no cross talk or see any deposition from the other 3 sources.All sources should have debris shields that fully isolate them from each other and prevent any cross contamination between sourcesBoat/crucible sizes at least 2ccPneumatic source shutters on 4 sources.Minimum of 4 Quartz Crystal Monitors. Each Monitor should be water cooled and mounted to a fixed bracket to maintain its position and remove any loss in accuracy from vibrations or movement of the sensor.Deposition rate control: 0.01 10 /s.Pneumatic substrate shutter.Rotating substrate, up to (at least) 30rpm.Heated substrate holder with direct thermocouple feedback control capable of > 300C on the substrate surface.Automated deposition software with programmable recipes.Automated system control/monitoring from a PC/PLC based system.Integrated with glovebox for loading/unloading substrates from an inert environment.Vacuum requirements:Chamber base pressure < 5x10-7 TorrDeposition pressure < 5x10-6 Torr

Product Codes: 49021, 49330, 49332

Agency Information

Issuing Agency: University of Central Florida

State: Florida

Agency Type: State and Local

Contact: Cali Jones, Purchasing Department 4000 Central Florida Blvd., Post Office Box 163020, Orlando, Florida, 32816

Phone: 407-823-2661

Fax: 407-823-5551




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