Government Contract | Arizona
Electron Beam Evaporator

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Bid Information

Bid Alert No: 00000587994

Bid Title: Electron Beam Evaporator

Agency Bid No. Title: S131616

Received Date: 06/01/2016

Close Date: 06/09/2016

Purchase Type: Not Stated

Delivery Point: University of Arizona, Tucson, Arizona

Delivery Date: Not Stated

Special Notices: Questions Due By 06/03/2016 12:00 PM


Specifications include, but are not limited to: An electron beam (E-beam) evaporator is used for the deposition of metals, semiconductors anddielectrics for micro fabrication processes. The some crucial properties of an E-beam evaporator arevacuum level, pump down time and film uniformity. The evaporator to be bought will be used for liftoff processing were a deposition direction normal to the substrate is needed. Below is a list ofspecifications:- Chamber or parts of the chamber most be load locked or otherwise separated to reduce pumpdown time and protect sources from air during sample loading.- A cryo pump should be used for high vacuum pumping, to reduce pump down and ensure highvacuum.- The E-beam gun should have at least 6 pockets.

Bid Related Documents

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Product Codes: 49330, 49332

Agency Information

Issuing Agency: University of Arizona

State: Arizona

Agency Type: State and Local

Contact: Lila Sorensen, Procurement and Contracting Services 220 W. 6th Street, 5th Floor, University Services Annex, Bldg. 300A, Tucson, Arizona, 85721

Phone: 520-626-3538

Fax: 520-621-5179




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